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Atomic layer deposition (ald)
| Глоссарий терминов в нанотехнологиях |
A technique used to deposit thin-films one atomic layer at a time using self-limiting gas phase reactions.
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Beam pen lithography (bpl), английский
A cantilever-free scanning probe technique based on polymer pen lithography, where patterning is accomplished by passing light through small apertures at the tips of pens in a two-dimensional tip array.
Atomic force microscope (afm), английский
A scanning probe microscopy instrument capable of revealing the structure of samples. the afm uses a sharp metal tip positioned over a conducting or non-conducting substrate and the surface topography is mapped out by measuring the mechanical force exerted on the tip. see scanning probe microscopy.
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